Zhu, Yong, and Chang, Tzu-Hsuan. A review of microelectromechanical systems for nanoscale mechanical characterization. Journal of Micromechanics and Microengineering 25.9 Web. doi:10.1088/0960-1317/25/9/093001.

Zhu, Yong, & Chang, Tzu-Hsuan. A review of microelectromechanical systems for nanoscale mechanical characterization. Journal of Micromechanics and Microengineering, 25 (9). https://doi.org/10.1088/0960-1317/25/9/093001

Zhu, Yong, and Chang, Tzu-Hsuan. "A review of microelectromechanical systems for nanoscale mechanical characterization". Journal of Micromechanics and Microengineering 25 (9). Country unknown/Code not available: IOP Publishing. https://doi.org/10.1088/0960-1317/25/9/093001. https://par.nsf.gov/biblio/10014670.

@article{osti_10014670,
place = {Country unknown/Code not available}, title = {A review of microelectromechanical systems for nanoscale mechanical characterization}, url = {https://par.nsf.gov/biblio/10014670}, DOI = {10.1088/0960-1317/25/9/093001}, abstractNote = {Not Available}, journal = {Journal of Micromechanics and Microengineering}, volume = {25}, number = {9}, publisher = {IOP Publishing}, author = {Zhu, Yong and Chang, Tzu-Hsuan}, }