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Title: Mechanical losses of oscillators fabricated in silicon wafers
Authors:
;
Publication Date:
NSF-PAR ID:
10014937
Journal Name:
Classical and Quantum Gravity
Volume:
32
Issue:
19
Page Range or eLocation-ID:
Article No. 195002
ISSN:
0264-9381
Publisher:
IOP Publishing
Sponsoring Org:
National Science Foundation
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