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Title: Mechanical losses of oscillators fabricated in silicon wafers
NSF-PAR ID:
10014937
Author(s) / Creator(s):
;
Publisher / Repository:
IOP Publishing
Date Published:
Journal Name:
Classical and Quantum Gravity
Volume:
32
Issue:
19
ISSN:
0264-9381
Page Range / eLocation ID:
Article No. 195002
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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