Li, Luping, Fang, Yin, Xu, Cheng, Zhao, Yang, Zang, Nanzhi, Jiang, Peng, and Ziegler, Kirk J. Fabricating vertically aligned sub-20 nm Si nanowire arrays by chemical etching and thermal oxidation. Nanotechnology 27.16 Web. doi:10.1088/0957-4484/27/16/165303.

Li, Luping, Fang, Yin, Xu, Cheng, Zhao, Yang, Zang, Nanzhi, Jiang, Peng, & Ziegler, Kirk J. Fabricating vertically aligned sub-20 nm Si nanowire arrays by chemical etching and thermal oxidation. Nanotechnology, 27 (16). https://doi.org/10.1088/0957-4484/27/16/165303

Li, Luping, Fang, Yin, Xu, Cheng, Zhao, Yang, Zang, Nanzhi, Jiang, Peng, and Ziegler, Kirk J. "Fabricating vertically aligned sub-20 nm Si nanowire arrays by chemical etching and thermal oxidation". Nanotechnology 27 (16). Country unknown/Code not available: IOP Publishing. https://doi.org/10.1088/0957-4484/27/16/165303. https://par.nsf.gov/biblio/10015296.

@article{osti_10015296,
place = {Country unknown/Code not available}, title = {Fabricating vertically aligned sub-20 nm Si nanowire arrays by chemical etching and thermal oxidation}, url = {https://par.nsf.gov/biblio/10015296}, DOI = {10.1088/0957-4484/27/16/165303}, abstractNote = {Not Available}, journal = {Nanotechnology}, volume = {27}, number = {16}, publisher = {IOP Publishing}, author = {Li, Luping and Fang, Yin and Xu, Cheng and Zhao, Yang and Zang, Nanzhi and Jiang, Peng and Ziegler, Kirk J.}, }