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Title: Micromachined silicon acoustic delay line with 3D-printed micro linkers and tapered input for improved structural stability and acoustic directivity
Authors:
; ; ;
Publication Date:
NSF-PAR ID:
10018841
Journal Name:
Journal of Micromechanics and Microengineering
Volume:
26
Issue:
10
Page Range or eLocation-ID:
105003
ISSN:
0960-1317
Publisher:
IOP Publishing
Sponsoring Org:
National Science Foundation
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