skip to main content


Title: Nonlinearity of Degenerately Doped Bulk-Mode Silicon MEMS Resonators
NSF-PAR ID:
10019912
Author(s) / Creator(s):
; ; ; ; ; ; ;
Publisher / Repository:
Institute of Electrical and Electronics Engineers
Date Published:
Journal Name:
Journal of Microelectromechanical Systems
Volume:
25
Issue:
5
ISSN:
1057-7157
Page Range / eLocation ID:
859 to 869
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
More Like this
No document suggestions found