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Title: Fabrication of sub-10 nm metal nanowire arrays with sub-1 nm critical dimension control
PAR ID:
10020302
Author(s) / Creator(s):
; ;
Publisher / Repository:
IOP Publishing
Date Published:
Journal Name:
Nanotechnology
Volume:
27
Issue:
46
ISSN:
0957-4484
Page Range / eLocation ID:
Article No. 464004
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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