Gallium Nitride as an Electromechanical Material
- NSF-PAR ID:
- 10020739
- Publisher / Repository:
- Institute of Electrical and Electronics Engineers
- Date Published:
- Journal Name:
- Journal of Microelectromechanical Systems
- Volume:
- 23
- Issue:
- 6
- ISSN:
- 1057-7157
- Page Range / eLocation ID:
- 1252 to 1271
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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