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Title: Tuning the resonance frequencies and mode shapes in a large range multi-degree of freedom micromirror
PAR ID:
10024143
Author(s) / Creator(s):
; ;
Publisher / Repository:
Optical Society of America
Date Published:
Journal Name:
Optics Express
Volume:
25
Issue:
7
ISSN:
1094-4087
Page Range / eLocation ID:
7895
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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