Silicon is a common material for photonics due to its favorable optical properties in the telecom and mid-wave IR bands, as well as compatibility with a wide range of complementary metal–oxide semiconductor (CMOS) foundry processes. Crystalline inversion symmetry precludes silicon from natively exhibiting second-order nonlinear optical processes. In this work, we build on recent works in silicon photonics that break this material symmetry using large bias fields, thereby enabling χ (2) interactions. Using this approach, we demonstrate both second-harmonic generation (with a normalized efficiency of 0.20%W −1 cm −2 ) and, to our knowledge, the first degenerate χ (2) optical parametric amplifier (with an estimated normalized gain of 0.6dBW −1/2 cm −1 ) using silicon-on-insulator waveguides fabricated in a CMOS-compatible commercial foundry. We expect this technology to enable the integration of novel nonlinear optical devices such as optical parametric amplifiers, oscillators, and frequency converters into large-scale, hybrid photonic–electronic systems by leveraging the extensive ecosystem of CMOS fabrication.
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Observation of second-harmonic generation in silicon nitride waveguides through bulk nonlinearities
We present experimental results on the observation of a bulk second-order nonlinear susceptibility, derived from both free-space and integrated measurements, in silicon nitride. Phase-matching is achieved through dispersion engineering of the waveguide crosssection, independently revealing multiple components of the nonlinear susceptibility, namely χ(2)yyy = 0.14 ± 0.08 pm/V and χ(2)xxy = 0.30 ± 0.18 pm/V. Additionally, we show how the second-harmonic signal may be tuned through the application of bias voltages across silicon nitride. The material properties measured here are anticipated to allow for the realization of new nanophotonic devices in CMOS-compatible silicon nitride waveguides, adding to their viability for telecommunication, data communication, and optical signal processing applications.
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- Award ID(s):
- 1644647
- PAR ID:
- 10025406
- Date Published:
- Journal Name:
- Optics express
- Volume:
- 24
- Issue:
- 15
- ISSN:
- 1094-4087
- Page Range / eLocation ID:
- 16923-16933
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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