Saha, Bivas, Peschot, Alexis, Osoba, Benjamin, Ko, Changhyun, Rubin, Leonard, Liu, Tsu-JaeKing, and Wu, Junqiao.
"Reducing adhesion energy of micro-relay electrodes by ion beam synthesized oxide nanolayers". APL Materials 5 (3). United States: American Institute of Physics. https://doi.org/10.1063/1.4978436.https://par.nsf.gov/biblio/10033216.
@article{osti_10033216,
place = {United States},
title = {Reducing adhesion energy of micro-relay electrodes by ion beam synthesized oxide nanolayers},
url = {https://par.nsf.gov/biblio/10033216},
DOI = {10.1063/1.4978436},
abstractNote = {Not Available},
journal = {APL Materials},
volume = {5},
number = {3},
publisher = {American Institute of Physics},
author = {Saha, Bivas and Peschot, Alexis and Osoba, Benjamin and Ko, Changhyun and Rubin, Leonard and Liu, Tsu-JaeKing and Wu, Junqiao},
}
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