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Title: Reducing adhesion energy of micro-relay electrodes by ion beam synthesized oxide nanolayers
NSF-PAR ID:
10033216
Author(s) / Creator(s):
 ;  ;  ;  ;  ;  ;  
Publisher / Repository:
American Institute of Physics
Date Published:
Journal Name:
APL Materials
Volume:
5
Issue:
3
ISSN:
2166-532X
Page Range / eLocation ID:
036103
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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