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Title: Atomic layer deposition of molybdenum disulfide films using MoF 6 and H 2 S
NSF-PAR ID:
10048824
Author(s) / Creator(s):
 ;  ;  ;  ;  ;  ;  ;  ;  
Publisher / Repository:
American Vacuum Society
Date Published:
Journal Name:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Volume:
36
Issue:
1
ISSN:
0734-2101
Page Range / eLocation ID:
01A125
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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