Berger, Birk, Steinberger, Thomas, Schüngel, Edmund, Koepke, Mark, Mussenbrock, Thomas, Awakowicz, Peter, and Schulze, Julian. Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase. Applied Physics Letters 111.20 Web. doi:10.1063/1.5000144.

Berger, Birk, Steinberger, Thomas, Schüngel, Edmund, Koepke, Mark, Mussenbrock, Thomas, Awakowicz, Peter, & Schulze, Julian. Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase. Applied Physics Letters, 111 (20). https://doi.org/10.1063/1.5000144

Berger, Birk, Steinberger, Thomas, Schüngel, Edmund, Koepke, Mark, Mussenbrock, Thomas, Awakowicz, Peter, and Schulze, Julian. "Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase". Applied Physics Letters 111 (20). United States: American Institute of Physics. https://doi.org/10.1063/1.5000144. https://par.nsf.gov/biblio/10052920.

@article{osti_10052920,
place = {United States}, title = {Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase}, url = {https://par.nsf.gov/biblio/10052920}, DOI = {10.1063/1.5000144}, abstractNote = {Not Available}, journal = {Applied Physics Letters}, volume = {111}, number = {20}, publisher = {American Institute of Physics}, author = {Berger, Birk and Steinberger, Thomas and Schüngel, Edmund and Koepke, Mark and Mussenbrock, Thomas and Awakowicz, Peter and Schulze, Julian}, }