Liu, Lei, Sridhar, Shyam, Zhu, Weiye, Donnelly, Vincent M., Economou, Demetre J., Logue, Michael D., and Kushner, Mark J. External control of electron energy distributions in a dual tandem inductively coupled plasma. Journal of Applied Physics 118.8 Web. doi:10.1063/1.4928870.

Liu, Lei, Sridhar, Shyam, Zhu, Weiye, Donnelly, Vincent M., Economou, Demetre J., Logue, Michael D., & Kushner, Mark J. External control of electron energy distributions in a dual tandem inductively coupled plasma. Journal of Applied Physics, 118 (8). https://doi.org/10.1063/1.4928870

Liu, Lei, Sridhar, Shyam, Zhu, Weiye, Donnelly, Vincent M., Economou, Demetre J., Logue, Michael D., and Kushner, Mark J. "External control of electron energy distributions in a dual tandem inductively coupled plasma". Journal of Applied Physics 118 (8). United States: American Institute of Physics. https://doi.org/10.1063/1.4928870. https://par.nsf.gov/biblio/10052926.

@article{osti_10052926,
place = {United States}, title = {External control of electron energy distributions in a dual tandem inductively coupled plasma}, url = {https://par.nsf.gov/biblio/10052926}, DOI = {10.1063/1.4928870}, abstractNote = {Not Available}, journal = {Journal of Applied Physics}, volume = {118}, number = {8}, publisher = {American Institute of Physics}, author = {Liu, Lei and Sridhar, Shyam and Zhu, Weiye and Donnelly, Vincent M. and Economou, Demetre J. and Logue, Michael D. and Kushner, Mark J.}, }