Tilka, J. A., Park, J., Ahn, Y., Pateras, A., Sampson, K. C., Savage, D. E., Prance, J. R., Simmons, C. B., Coppersmith, S. N., Eriksson, M. A., Lagally, M. G., Holt, M. V., and Evans, P. G. Combining experiment and optical simulation in coherent X-ray nanobeam characterization of Si/SiGe semiconductor heterostructures. Journal of Applied Physics 120.1 Web. doi:10.1063/1.4955043.

Tilka, J. A., Park, J., Ahn, Y., Pateras, A., Sampson, K. C., Savage, D. E., Prance, J. R., Simmons, C. B., Coppersmith, S. N., Eriksson, M. A., Lagally, M. G., Holt, M. V., & Evans, P. G. Combining experiment and optical simulation in coherent X-ray nanobeam characterization of Si/SiGe semiconductor heterostructures. Journal of Applied Physics, 120 (1). https://doi.org/10.1063/1.4955043

Tilka, J. A., Park, J., Ahn, Y., Pateras, A., Sampson, K. C., Savage, D. E., Prance, J. R., Simmons, C. B., Coppersmith, S. N., Eriksson, M. A., Lagally, M. G., Holt, M. V., and Evans, P. G. "Combining experiment and optical simulation in coherent X-ray nanobeam characterization of Si/SiGe semiconductor heterostructures". Journal of Applied Physics 120 (1). United States: American Institute of Physics. https://doi.org/10.1063/1.4955043. https://par.nsf.gov/biblio/10052964.

@article{osti_10052964,
place = {United States}, title = {Combining experiment and optical simulation in coherent X-ray nanobeam characterization of Si/SiGe semiconductor heterostructures}, url = {https://par.nsf.gov/biblio/10052964}, DOI = {10.1063/1.4955043}, abstractNote = {Not Available}, journal = {Journal of Applied Physics}, volume = {120}, number = {1}, publisher = {American Institute of Physics}, author = {Tilka, J. A. and Park, J. and Ahn, Y. and Pateras, A. and Sampson, K. C. and Savage, D. E. and Prance, J. R. and Simmons, C. B. and Coppersmith, S. N. and Eriksson, M. A. and Lagally, M. G. and Holt, M. V. and Evans, P. G.}, }