skip to main content


Title: An architecture for integrating planar and 3D cQED devices
NSF-PAR ID:
10053021
Author(s) / Creator(s):
 ;  ;  ;  ;  ;  ;  ;  ;  ;  
Publisher / Repository:
American Institute of Physics
Date Published:
Journal Name:
Applied Physics Letters
Volume:
109
Issue:
4
ISSN:
0003-6951
Page Range / eLocation ID:
042601
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
More Like this
No document suggestions found