An architecture for integrating planar and 3D cQED devices
- NSF-PAR ID:
- 10053021
- Publisher / Repository:
- American Institute of Physics
- Date Published:
- Journal Name:
- Applied Physics Letters
- Volume:
- 109
- Issue:
- 4
- ISSN:
- 0003-6951
- Page Range / eLocation ID:
- 042601
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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