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Title: Nanoimprint-assisted shear exfoliation plus transfer printing for producing transition metal dichalcogenide heterostructures
PAR ID:
10053025
Author(s) / Creator(s):
 ;  ;  ;  ;  
Publisher / Repository:
American Vacuum Society
Date Published:
Journal Name:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Volume:
34
Issue:
6
ISSN:
2166-2746
Page Range / eLocation ID:
06KA01
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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