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Title: Catalyst and processing effects on metal-assisted chemical etching for the production of highly porous GaN
Award ID(s):
1111739
NSF-PAR ID:
10054359
Author(s) / Creator(s):
; ; ; ;
Date Published:
Journal Name:
Semiconductor Science and Technology
Volume:
28
Issue:
6
ISSN:
0268-1242
Page Range / eLocation ID:
065001
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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