Catalyst and processing effects on metal-assisted chemical etching for the production of highly porous GaN
- Award ID(s):
- 1111739
- NSF-PAR ID:
- 10054359
- Date Published:
- Journal Name:
- Semiconductor Science and Technology
- Volume:
- 28
- Issue:
- 6
- ISSN:
- 0268-1242
- Page Range / eLocation ID:
- 065001
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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