Free-Standing β-Ga2O3 Thin Diaphragms
- Award ID(s):
- 1755479
- Publication Date:
- NSF-PAR ID:
- 10056226
- Journal Name:
- Journal of Electronic Materials
- Volume:
- 47
- Issue:
- 2
- Page Range or eLocation-ID:
- 973 to 981
- ISSN:
- 0361-5235
- Sponsoring Org:
- National Science Foundation
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Accepted Manuscript1.0
- Publisher's Version of Record
- https://doi.org/10.1007/s11664-017-5978-7
