Fabrication of microfluidic cavities using Si-to-glass anodic bonding
- Award ID(s):
- 1708341
- NSF-PAR ID:
- 10064313
- Publisher / Repository:
- American Institute of Physics
- Date Published:
- Journal Name:
- Review of Scientific Instruments
- Volume:
- 89
- Issue:
- 7
- ISSN:
- 0034-6748
- Page Range / eLocation ID:
- 073902
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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