skip to main content

Title: Fabrication of microfluidic cavities using Si-to-glass anodic bonding
Authors:
 ;  ;  ;  ;  ;  ;  ;  ;  ;  
Award ID(s):
1708341
Publication Date:
NSF-PAR ID:
10064313
Journal Name:
Review of Scientific Instruments
Volume:
89
Issue:
7
Page Range or eLocation-ID:
073902
ISSN:
0034-6748
Publisher:
American Institute of Physics
Sponsoring Org:
National Science Foundation
More Like this
No document suggestions found