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Title: Fabrication of microfluidic cavities using Si-to-glass anodic bonding
Award ID(s):
1708341
NSF-PAR ID:
10064313
Author(s) / Creator(s):
 ;  ;  ;  ;  ;  ;  ;  ;  ;  
Publisher / Repository:
American Institute of Physics
Date Published:
Journal Name:
Review of Scientific Instruments
Volume:
89
Issue:
7
ISSN:
0034-6748
Page Range / eLocation ID:
073902
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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