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Title: CROSS-SECTIONAL QUASI- LAMÉ MODES IN THIN-FILM PIEZOELECTRIC-ONSILICON RESONATORS
Award ID(s):
1711632
PAR ID:
10066607
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
Hilton Head Workshop 2018: A Solid-State Sensors, Actuators and Microsystems Workshop
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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