Manufacturing PDMS micro lens array using spin coating under a multiphase system
- Award ID(s):
- 1538439
- PAR ID:
- 10067175
- Date Published:
- Journal Name:
- Journal of Micromechanics and Microengineering
- Volume:
- 27
- Issue:
- 5
- ISSN:
- 0960-1317
- Page Range / eLocation ID:
- 055012
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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