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Title: Modeling and experimental demonstration of high-throughput flow-through spatial atomic layer deposition of Al 2 O 3 coatings on textiles at atmospheric pressure
NSF-PAR ID:
10072548
Author(s) / Creator(s):
 ;  ;  ;  ;  
Publisher / Repository:
American Vacuum Society
Date Published:
Journal Name:
Journal of Vacuum Science & Technology A
Volume:
36
Issue:
3
ISSN:
0734-2101
Page Range / eLocation ID:
031517
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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