Modeling and experimental demonstration of high-throughput flow-through spatial atomic layer deposition of Al 2 O 3 coatings on textiles at atmospheric pressure
- NSF-PAR ID:
- 10072548
- Publisher / Repository:
- American Vacuum Society
- Date Published:
- Journal Name:
- Journal of Vacuum Science & Technology A
- Volume:
- 36
- Issue:
- 3
- ISSN:
- 0734-2101
- Page Range / eLocation ID:
- 031517
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation