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Title: Acoustic standing wave modulation of capacitively coupled plasmas
Award ID(s):
1724941
PAR ID:
10072844
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
Journal of Physics D: Applied Physics
Volume:
51
Issue:
28
ISSN:
0022-3727
Page Range / eLocation ID:
285201
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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