Multiple-Patterning Nanosphere Lithography for Fabricating Periodic Three-Dimensional Hierarchical Nanostructures
- Award ID(s):
- 1636136
- PAR ID:
- 10084919
- Date Published:
- Journal Name:
- ACS Nano
- Volume:
- 11
- Issue:
- 10
- ISSN:
- 1936-0851
- Page Range / eLocation ID:
- 10384 to 10391
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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