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  • A 10nm-Thick Hafnium Zirconium Oxide Piezoelectric Transducer for Extreme Miniaturization of Integrated Sensors and Actuators
Title: A 10nm-Thick Hafnium Zirconium Oxide Piezoelectric Transducer for Extreme Miniaturization of Integrated Sensors and Actuators
Award ID(s):
1752206
PAR ID:
10085128
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
2018 IEEE International Micro Electro Mechanical Systems (MEMS)
Page Range / eLocation ID:
292 - 295
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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