High Performance, Continuously Tunable Microwave Filters Using MEMS Devices With Very Large, Controlled, Out-of-Plane Actuation
- Award ID(s):
- 1647837
- PAR ID:
- 10086511
- Date Published:
- Journal Name:
- Journal of Microelectromechanical Systems
- Volume:
- 27
- Issue:
- 6
- ISSN:
- 1057-7157
- Page Range / eLocation ID:
- 1135 to 1147
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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