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Title: High Performance, Continuously Tunable Microwave Filters Using MEMS Devices With Very Large, Controlled, Out-of-Plane Actuation
Award ID(s):
1647837
PAR ID:
10086511
Author(s) / Creator(s):
; ; ; ; ;
Date Published:
Journal Name:
Journal of Microelectromechanical Systems
Volume:
27
Issue:
6
ISSN:
1057-7157
Page Range / eLocation ID:
1135 to 1147
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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