PWM as a Low Cost Method for the Analog Control of MEMS Devices
- PAR ID:
- 10089907
- Publisher / Repository:
- Institute of Electrical and Electronics Engineers
- Date Published:
- Journal Name:
- Journal of Microelectromechanical Systems
- Volume:
- 28
- Issue:
- 2
- ISSN:
- 1057-7157
- Page Range / eLocation ID:
- p. 245-253
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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