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Title: PWM as a Low Cost Method for the Analog Control of MEMS Devices
PAR ID:
10089907
Author(s) / Creator(s):
; ; ; ; ;
Publisher / Repository:
Institute of Electrical and Electronics Engineers
Date Published:
Journal Name:
Journal of Microelectromechanical Systems
Volume:
28
Issue:
2
ISSN:
1057-7157
Page Range / eLocation ID:
p. 245-253
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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