Low-Pressure Chemical Vapor Deposition of In 2 O 3 Films on Off-Axis c-Sapphire Substrates
- Award ID(s):
- 1755479
- NSF-PAR ID:
- 10090794
- Date Published:
- Journal Name:
- Crystal Growth & Design
- Volume:
- 19
- Issue:
- 3
- ISSN:
- 1528-7483
- Page Range / eLocation ID:
- 1965 to 1972
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation