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Title: Low-Pressure Chemical Vapor Deposition of In 2 O 3 Films on Off-Axis c-Sapphire Substrates
Award ID(s):
1755479
NSF-PAR ID:
10090794
Author(s) / Creator(s):
; ; ; ; ;
Date Published:
Journal Name:
Crystal Growth & Design
Volume:
19
Issue:
3
ISSN:
1528-7483
Page Range / eLocation ID:
1965 to 1972
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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