Low Pressure Chemical Vapor Deposition Growth of Wide Bandgap Semiconductor In 2 O 3 Films
- Award ID(s):
- 1755479
- NSF-PAR ID:
- 10090797
- Date Published:
- Journal Name:
- Crystal Growth & Design
- Volume:
- 18
- Issue:
- 8
- ISSN:
- 1528-7483
- Page Range / eLocation ID:
- 4495 to 4502
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation