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Title: Low Pressure Chemical Vapor Deposition Growth of Wide Bandgap Semiconductor In 2 O 3 Films
Award ID(s):
1755479
PAR ID:
10090797
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
Crystal Growth & Design
Volume:
18
Issue:
8
ISSN:
1528-7483
Page Range / eLocation ID:
4495 to 4502
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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