skip to main content


Title: Functional model for analysis of ALD nucleation and quantification of area-selective deposition
Award ID(s):
1704151
NSF-PAR ID:
10091417
Author(s) / Creator(s):
Date Published:
Journal Name:
Journal of Vacuum Science & Technology A
Volume:
37
Issue:
2
ISSN:
0734-2101
Page Range / eLocation ID:
020911
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
More Like this
No document suggestions found