Resistivity and surface scattering of (0001) single crystal ruthenium thin films
- Publication Date:
- NSF-PAR ID:
- 10102054
- Journal Name:
- Journal of Vacuum Science & Technology A
- Volume:
- 37
- Issue:
- 3
- Page Range or eLocation-ID:
- Article No. 031516
- ISSN:
- 0734-2101
- Publisher:
- American Vacuum Society
- Sponsoring Org:
- National Science Foundation
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