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Title: Resistivity and surface scattering of (0001) single crystal ruthenium thin films
Authors:
 ;  ;  ;  ;  ;  ;  
Award ID(s):
1740270 1740228
Publication Date:
NSF-PAR ID:
10102054
Journal Name:
Journal of Vacuum Science & Technology A
Volume:
37
Issue:
3
Page Range or eLocation-ID:
Article No. 031516
ISSN:
0734-2101
Publisher:
American Vacuum Society
Sponsoring Org:
National Science Foundation
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