skip to main content


Title: Resistivity and surface scattering of (0001) single crystal ruthenium thin films
Award ID(s):
1740270 1740228
NSF-PAR ID:
10102054
Author(s) / Creator(s):
 ;  ;  ;  ;  ;  ;  
Publisher / Repository:
American Vacuum Society
Date Published:
Journal Name:
Journal of Vacuum Science & Technology A
Volume:
37
Issue:
3
ISSN:
0734-2101
Page Range / eLocation ID:
Article No. 031516
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
More Like this
No document suggestions found