Side-Supported Radial-Mode Thin-Film Piezoelectric-on-Silicon Disk Resonators
- Award ID(s):
- 1711632
- PAR ID:
- 10108011
- Date Published:
- Journal Name:
- IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
- Volume:
- 66
- Issue:
- 4
- ISSN:
- 0885-3010
- Page Range / eLocation ID:
- 727 to 736
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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