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Title: PARYLENE-COATED PIEZOELECTRICALLY-ACTUATED SILICON DISC RESONATORS FOR LIQUID-PHASE SENSING
Award ID(s):
1711632
PAR ID:
10108018
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
International Solid-State Sensors, Actuators and Microsystems Conference
ISSN:
2167-0021
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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