Nanoscale groove textured β-Ga 2 O 3 by room temperature inverse metal-assisted chemical etching and photodiodes with enhanced responsivity
- Award ID(s):
- 1809946
- NSF-PAR ID:
- 10108875
- Date Published:
- Journal Name:
- Applied Physics Letters
- Volume:
- 113
- Issue:
- 22
- ISSN:
- 0003-6951
- Page Range / eLocation ID:
- 222104
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation