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			<titleStmt><title level='a'>A High Sensitivity Microfluidic Channel Enabled Terahertz Metamaterial Absorber For Sensing And Detection</title></titleStmt>
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				<date>06/01/2019</date>
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					<idno type="par_id">10112052</idno>
					<idno type="doi">10.1109/TRANSDUCERS.2019.8808769</idno>
					<title level='j'>2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems &amp; Eurosensors XXXIII (TRANSDUCERS &amp; EUROSENSORS XXXIII)</title>
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					<author>Guangwu Duan</author><author>Jacob Schalch</author><author>Xiaoguang Zhao</author><author>Aobo Li</author><author>Richard Averitt</author><author>Xin Zhang</author>
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			<abstract><ab><![CDATA[M et a m at eri als a n d m et a m at eri al a bs or b ers h a v e b e e n wi d el y r e p ort e d t o b e us e d i n s e nsi n g a n d d et e cti o n a p pli c ati o ns. A m o n g t h e m, m et a m at eri al a bs or b er is s u p eri or b y its hi g h-q u alit y f a ct or, a n d its hi g h s e nsiti vit y t o t h e c h a n g e of t h e s urr o u n di n g e n vir o n m e nt. H o w e v er, t h e c o n v e nti o n al m et a m at eri als a n d m et a m at eri al a bs or b ers ar e c o nfi g ur e d wit h r el ati v el y t hi c k s u bstr at e s as t h eir s u p p orti n g str u ct ur es wit h hi g h p er mitti vit y, w hi c h c o m pr o mis es t h e s e nsiti vit y. H er ei n w e utili z e t hi n sili c o n nitri d e m e m br a n e as t h e s u p p orti n g str u ct ur e f or t h e m et a m at eri al l a y er t o eli mi n at e t h e hi g h p er mitti vit y eff e ct of t h e b ul k s u bstr at e t o a c hi e v e a m u c h hi g h er s e nsiti vit y. M or e o v er, w e fi n d t h e s e nsiti vit y c a n b e f urt h er i n cr e as e d wit h t hi c k er s p a c er t hi c k n e ss. T h e f a bri c at e d d e vi c es d e m o nstr at e a m or e t h a n 3 ti m es i m pr o v e m e nt i n s e nsiti vit y c o m p ar e d wit h t h e st at e of art. K E Y W O R D S M et a m at eri al, M et a m at eri al a bs or b er, Mi cr ofl ui di c c h a n n el, T hi n fil m, Hi g h q u alit y f a ct or, S e nsi n g a n d d et e cti o n]]></ab></abstract>
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<div xmlns="http://www.tei-c.org/ns/1.0"><head>S Y S T E M D E SI G N Fi g ur e 1 s h o ws t h e s c h e m ati c dr a wi n g of t h e d esi g n.</head><p>A "fr e e-st a n di n g " m et a m at eri al l a y er, wit h s plit ri n g r es o n at ors as u nit c ells a n d Si Nx as s u p p orti n g m e m br a n e, w <ref type="table">9 7 8-1-5 3 8 6-8 1 0 4-6/ 1 9/ $ 3 1. 0 0 &#169; 2 0 1 9 I E E E  2 2 9 4</ref> T 3 P. 1 2 3 <ref type="table">2 3-2 7 J u n e 2 0 1</ref>    C O N T A C T * X. Z h a n g, t el: + 1-6 1 7-3 5 8-2 7 0 2; xi n z @ b u. e d u</p></div>
<div xmlns="http://www.tei-c.org/ns/1.0"><head>a s e m pl o y e d as t h e t o p l a y er of t h e m et a m at eri al a bs or b er. It als o s er v es as t h e t esti n g wi n d o w f or t h e i n ci d e nt T H z p uls e s. T h e d e pt h a n d s h a p e of t h e mi cr ofl ui di c c h a n n el w as d efi n e d b y t h e S U 8 l a y er, w hi c h w a s p att er n e d o n a gr o u n d pl a n e. T h e i n-c h a n n el m e di a,</head></div>
<div xmlns="http://www.tei-c.org/ns/1.0"><head>T h e f a bri c at e d d e vi c es w er e t est e d wit h T H z ti m e d o m ai n s p e ctr os c o p y. T h e a bs or pti o n s p e ctr a w er e m e as ur e d wit h diff er e nt fl ui di cs i nsi d e t h e mi cr ofl ui di c c h a n n el. T h e m e as ur e m e nts ar e ill ustr at e d i n Fi g ur e 5. T h e a bs or pti o n s p e ctr u m w as first m e a s ur e d wit h air a s t h e di el e ctri c s p a c er, s h o wi n g a n a bs or pti o n p e a k at 1. 3 3 T H z. T h e n m et h a n ol w as i nj e ct e d wit h a s yri n g e t o fill t h e mi cr ofl ui di c c h a n n el, a n d t h e a bs</head></div>
<div xmlns="http://www.tei-c.org/ns/1.0"><head>T h e s e nsiti vit y e n h a n c e m e nt is d u e t o t h e "fr e est a n di n g " m et a m at eri al l a y er a n d t h e l ar g e c h a n n el d e pt h. Wit h t h e i n cr e as e i n t h e d e pt h of t h e c h a n n el, a n ot h er</head></div></body>
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