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Title: Scalable 3D Ta:SiO x Memristive Devices
Abstract

A highly reliable memristive device based on tantalum‐doped silicon oxide is reported, which exhibits high uniformity, robust endurance (≈1 × 109cycles), fast switching speed, long retention, and analog conductance modulation. Devices with junction areas ranging from microscale to as small as 60 × 15 nm2are fabricated and electrically characterized. ON‐/OFF‐ conductance and reset current show weak area dependence when the device is relatively large, and they become proportional to the device area when further scaled down. Two‐layer devices with repeatable switching behavior are achieved. The current study shows the potentials of Ta:SiO2‐based 3D vertical devices for memory and computing applications. It also suggests that doping of the switching layer is an efficient approach to engineer the performance of memristive devices.

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Award ID(s):
1740248
NSF-PAR ID:
10460665
Author(s) / Creator(s):
 ;  ;  ;  ;  ;  
Publisher / Repository:
Wiley Blackwell (John Wiley & Sons)
Date Published:
Journal Name:
Advanced Electronic Materials
Volume:
5
Issue:
9
ISSN:
2199-160X
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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    References

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    [2] Hadsellet al.,Journal of Field Robotics,vol. 26, no. 2, pp. 120-144, 2009.

    [3] Najafabadiet al.,Journal of Big Data,vol. 2, no. 1, p. 1, 2015.

    [4] Zhaoet al.,Applied Physics Reviews,vol. 7, no. 1, 2020.

    [5] Zidanet al.,Nature Electronics,vol. 1, no. 1, pp. 22-29, 2018.

    [6] Wulfet al.,SIGARCH Comput. Archit. News,vol. 23, no. 1, pp. 20–24, 1995.

    [7] Wilkes,SIGARCH Comput. Archit. News,vol. 23, no. 4, pp. 4–6, 1995.

    [8] Ielminiet al.,Nature Electronics,vol. 1, no. 6, pp. 333-343, 2018.

    [9] Changet al.,Nano Letters,vol. 10, no. 4, pp. 1297-1301, 2010.

    [10] Qinet al., Physica Status Solidi (RRL) - Rapid Research Letters, pssr.202200075R1, In press, 2022.

     
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