Zheng, Bocong, Shrestha, Maheshwar, Wang, Keliang, Schuelke, Thomas, Shun’ko, Evgeny, Belkin, Veniamin, and Fan, Qi Hua. Reduction of capacitive coupling in inductively coupled plasmas by solenoid coils on dielectric window. Journal of Applied Physics 126.12 Web. doi:10.1063/1.5116585.

Zheng, Bocong, Shrestha, Maheshwar, Wang, Keliang, Schuelke, Thomas, Shun’ko, Evgeny, Belkin, Veniamin, & Fan, Qi Hua. Reduction of capacitive coupling in inductively coupled plasmas by solenoid coils on dielectric window. Journal of Applied Physics, 126 (12). https://doi.org/10.1063/1.5116585

Zheng, Bocong, Shrestha, Maheshwar, Wang, Keliang, Schuelke, Thomas, Shun’ko, Evgeny, Belkin, Veniamin, and Fan, Qi Hua. "Reduction of capacitive coupling in inductively coupled plasmas by solenoid coils on dielectric window". Journal of Applied Physics 126 (12). Country unknown/Code not available: American Institute of Physics. https://doi.org/10.1063/1.5116585. https://par.nsf.gov/biblio/10118595.

@article{osti_10118595,
place = {Country unknown/Code not available}, title = {Reduction of capacitive coupling in inductively coupled plasmas by solenoid coils on dielectric window}, url = {https://par.nsf.gov/biblio/10118595}, DOI = {10.1063/1.5116585}, abstractNote = {Not Available}, journal = {Journal of Applied Physics}, volume = {126}, number = {12}, publisher = {American Institute of Physics}, author = {Zheng, Bocong and Shrestha, Maheshwar and Wang, Keliang and Schuelke, Thomas and Shun’ko, Evgeny and Belkin, Veniamin and Fan, Qi Hua}, }