skip to main content


Title: Nanoscale kinetics and dynamics during Ar+ patterning of SiO2
Award ID(s):
1709380
NSF-PAR ID:
10119737
Author(s) / Creator(s):
; ; ; ; ;
Publisher / Repository:
American Physical Society
Date Published:
Journal Name:
Physical Review B
Volume:
99
Issue:
16
ISSN:
2469-9950; PRBMDO
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
More Like this