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Title: Ultrathin initiated chemical vapor deposition polymer interfacial energy control for directed self-assembly hole-shrink applications
NSF-PAR ID:
10120585
Author(s) / Creator(s):
 ;  ;  ;  ;  ;  ;  
Publisher / Repository:
American Vacuum Society
Date Published:
Journal Name:
Journal of Vacuum Science & Technology B
Volume:
37
Issue:
6
ISSN:
2166-2746
Page Range / eLocation ID:
Article No. 061804
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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