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Title: A 30-nm thick integrated hafnium zirconium oxide nano-electro-mechanical membrane resonator
Award ID(s):
1752206
PAR ID:
10132148
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
Applied Physics Letters
Volume:
116
Issue:
4
ISSN:
0003-6951
Page Range / eLocation ID:
043501
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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