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Title: A Super-High-Frequency Non-Released Silicon Fin Bulk Acoustic Resonator
Award ID(s):
1752206
PAR ID:
10132156
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
IEEE International Microwave Symposium
Page Range / eLocation ID:
516 to 519
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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