Optimal placement of droplets for UV nanoimprint lithography
- NSF-PAR ID:
- 10140291
- Publisher / Repository:
- American Vacuum Society
- Date Published:
- Journal Name:
- Journal of Vacuum Science & Technology B
- Volume:
- 38
- Issue:
- 2
- ISSN:
- 2166-2746
- Page Range / eLocation ID:
- Article No. 022601
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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