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Title: Volatile Etch Species Produced during Thermal Al 2 O 3 Atomic Layer Etching
Award ID(s):
1800584
PAR ID:
10143210
Author(s) / Creator(s):
; ; ; ;
Date Published:
Journal Name:
The Journal of Physical Chemistry C
Volume:
124
Issue:
1
ISSN:
1932-7447
Page Range / eLocation ID:
287 to 299
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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