Gas-phase diagnostic studies of H 2 and CH 4 inductively coupled plasmas
- Award ID(s):
- 1803067
- PAR ID:
- 10145559
- Publisher / Repository:
- American Vacuum Society
- Date Published:
- Journal Name:
- Journal of Vacuum Science & Technology A
- Volume:
- 38
- Issue:
- 3
- ISSN:
- 0734-2101
- Page Range / eLocation ID:
- Article No. 033010
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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