Mousavi, Behnam Kheyraddini, Mousavi, Arash Kheyraddini, Hieber, Tyler Jordan, Chen, James, and Leseman, Zayd Chad. Mode II adhesion energy analysis of stiction-failed poly-Si $\mu$ cantilevers using a MEMS load cell. Retrieved from https://par.nsf.gov/biblio/10151261. Journal of Micromechanics and Microengineering 29.7 Web. doi:10.1088/1361-6439/ab173e.

Mousavi, Behnam Kheyraddini, Mousavi, Arash Kheyraddini, Hieber, Tyler Jordan, Chen, James, & Leseman, Zayd Chad. Mode II adhesion energy analysis of stiction-failed poly-Si $\mu$ cantilevers using a MEMS load cell. Journal of Micromechanics and Microengineering, 29 (7). Retrieved from https://par.nsf.gov/biblio/10151261. https://doi.org/10.1088/1361-6439/ab173e

Mousavi, Behnam Kheyraddini, Mousavi, Arash Kheyraddini, Hieber, Tyler Jordan, Chen, James, and Leseman, Zayd Chad. "Mode II adhesion energy analysis of stiction-failed poly-Si $\mu$ cantilevers using a MEMS load cell". Journal of Micromechanics and Microengineering 29 (7). Country unknown/Code not available. https://doi.org/10.1088/1361-6439/ab173e. https://par.nsf.gov/biblio/10151261.

@article{osti_10151261,
place = {Country unknown/Code not available}, title = {Mode II adhesion energy analysis of stiction-failed poly-Si $\mu$ cantilevers using a MEMS load cell}, url = {https://par.nsf.gov/biblio/10151261}, DOI = {10.1088/1361-6439/ab173e}, abstractNote = {}, journal = {Journal of Micromechanics and Microengineering}, volume = {29}, number = {7}, author = {Mousavi, Behnam Kheyraddini and Mousavi, Arash Kheyraddini and Hieber, Tyler Jordan and Chen, James and Leseman, Zayd Chad}, }