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Title: Chemically Functionalizing Controlled Dielectric Breakdown Silicon Nitride Nanopores by Direct Photohydrosilylation
Award ID(s):
1808344 1150085
NSF-PAR ID:
10160224
Author(s) / Creator(s):
; ; ; ;
Date Published:
Journal Name:
ACS Applied Materials & Interfaces
Volume:
11
Issue:
33
ISSN:
1944-8244
Page Range / eLocation ID:
30411 to 30420
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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