Sang, Xia, Xia, Yantao, Sautet, Philippe, and Chang, Jane P. Atomic layer etching of metals with anisotropy, specificity, and selectivity. Journal of Vacuum Science & Technology A 38.4 Web. doi:10.1116/6.0000225.

Sang, Xia, Xia, Yantao, Sautet, Philippe, & Chang, Jane P. Atomic layer etching of metals with anisotropy, specificity, and selectivity. Journal of Vacuum Science & Technology A, 38 (4). https://doi.org/10.1116/6.0000225

Sang, Xia, Xia, Yantao, Sautet, Philippe, and Chang, Jane P. "Atomic layer etching of metals with anisotropy, specificity, and selectivity". Journal of Vacuum Science & Technology A 38 (4). Country unknown/Code not available: American Vacuum Society. https://doi.org/10.1116/6.0000225. https://par.nsf.gov/biblio/10163186.

@article{osti_10163186,
place = {Country unknown/Code not available}, title = {Atomic layer etching of metals with anisotropy, specificity, and selectivity}, url = {https://par.nsf.gov/biblio/10163186}, DOI = {10.1116/6.0000225}, abstractNote = {Not Available}, journal = {Journal of Vacuum Science & Technology A}, volume = {38}, number = {4}, publisher = {American Vacuum Society}, author = {Sang, Xia and Xia, Yantao and Sautet, Philippe and Chang, Jane P.}, }