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  • Confocal scanning photoluminescence for mapping electron and photon beam-induced microscopic changes in SiN x during nanopore fabrication
Title: Confocal scanning photoluminescence for mapping electron and photon beam-induced microscopic changes in SiN x during nanopore fabrication
Award ID(s):
1710831
PAR ID:
10170941
Author(s) / Creator(s):
; ; ; ;
Publisher / Repository:
IOP Publishing
Date Published:
Journal Name:
Nanotechnology
Volume:
31
Issue:
39
ISSN:
0957-4484
Page Range / eLocation ID:
Article No. 395202
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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