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Title: Effect of Metal-Assisted Catalytic Etching (MACE) on Single-Crystal Si Wafers With Faceted Macropores
Award ID(s):
1825331
PAR ID:
10171882
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
Microscopy and Microanalysis
Volume:
25
Issue:
S2
ISSN:
1431-9276
Page Range / eLocation ID:
2124 to 2125
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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